Dresden 2006 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Poster presentation
DS 24.33: Poster
Dienstag, 28. März 2006, 15:00–17:30, P2
High-resolution elemental depth profiling of PIII&D deposited multilayer coatings by ion beam techniques combined with EFTEM — •Florian Schwarz1,2, Jörg Lindner1, Maik Häberlen1, Götz Thorwarth1,2, Claus Hammerl2, Walter Assmann3, and Bernd Stritzker1 — 1Institut für Physik, Universität Ausgburg, 86135 Augsburg, Germany — 2AxynTeC Dünnschichttechnik GmbH, Am Mittleren Moos 48, 86167 Augsburg, Germany — 3Sektion Physik der LMU München, Am Coulombwall 6, 85748 Garching, Germany
The emergence of multilayered and nanostructured coatings requires analysis methods capable of high spatial resolution as well as high depth range. While traditional ion beam analysis methods are capable of accurate, standards-free determination of sample composition, methods such as energy filtered transmission electron microscopy (EFTEM) offer the desired short-range resolution, yet are deficient in the quantitative assessment of the elemental contributions. We demonstrate the combination of IBA (ERDA, RBS) measurements with EFTEM data for analysis of two protective multilayer-type coatings grown by plasma immersion ion implantation and deposition (PIII&D) resulting in high resolution elemental depth profiles.