Dresden 2006 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Poster presentation
DS 24.38: Poster
Dienstag, 28. März 2006, 15:00–17:30, P2
Effect of film thickness on the microstructures of Indium - Indium oxide composite films — •Deniz Deger and Kemal Ulutas — Istanbul Univ., Science Faculty, Physics
Pure indium metal thermally evaporated in the presence of oxygen atmosphere, with partial pressure of 5x10−4 Torr, onto glass substrates and onto C-Cu grid at room temperature. The structural characteristics of these optically transparent and electrically conducting thin films were investigated using XRD and TEM techniques and the results are discussed on the base of the differences in their morphologies and thicknesses. Cubic In2O3 and tetragonal In phases, with crystal structures and lattice parameters as reported in the literature, have been identified in the thinnest film having 1000 Å thickness. The tendency for amorphization of the cubic and tetragonal phases becomes evident as the film thickness increases.
Corresponding Author: Kemal Ulutas hku@istanbul.edu.tr