Dresden 2006 – scientific programme

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DS: Dünne Schichten

DS 4: Thin film analysis II

DS 4.2: Talk

Monday, March 27, 2006, 11:30–11:45, GER 38

Epitaxial anatase (012) and (001) films grown on (110) and (100) SrTiO₃ — •Andriy Lotnyk, Stephan Senz, and Dietrich Hesse — Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany

Rutile, anatase and brookite are well known polymorphs of TiO₂. The rutile structure is the thermodynamically most stable structure of TiO₂ at high temperatures and is the most widely studied. The anatase phase is a low temperature phase. This modification cannot be easily obtained with good crystallinity and its fundamental properties are not well understood. We report on the growth of epitaxial films of TiO₂ on (110) and (100) SrTiO₃ (STO). A TiO₂ target was electron beam evaporated in a high vacuum system with P_O2=1×10⁻² Pa. The substrates were heated at temperatures between 500^∘C and 1100^∘C during deposition. The grown films were investigated by XRD, AFM and TEM. The films are predominantly of anatase (A) structure at substrate temperatures between 500^∘C and 600^∘C. Texture measurements revealed the following orientation relationships: (012)/[100]A∥(110)/[001]STO and (001)/[100]A∥(100)/[001]STO. The orientation relationship of anatase films on (110) STO is reported first. With increasing temperature the average grain size of the thin films is increasing, as indicated by AFM investigations. (HR)TEM observations revealed grain boundaries in the films.