Dresden 2006 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Downloads | Hilfe

DS: Dünne Schichten

DS 6: Thin film analysis III

DS 6.2: Vortrag

Montag, 27. März 2006, 14:45–15:00, GER 38

High Resolution Rutherford Backscattering Spectrometer — •Martin Schnell, Michael Uhrmacher, Carsten Ronning, and Hans Hofsäss — II. Physikalisches Institut, Universität Göttingen, Friedrich-Hund-Platz 1, D-37077 Göttingen

A standard Rutherford Backscattering (RBS) set-up is equipped with silicon charged-particle detectors, which posess an energy resolution of 10 to 15 keV. This results in a limited depth resolution of about 5 to 10nm for stoichiometry analysis of thin films.

In this work, we describe a RBS set-up, which has been connected to the 500 keV heavy ion accelerator IONAS at the University of Göttingen. Using up to 1 MeV He²⁺ or 500 keV H⁺ as incident ion beams, the backscattered ions are now analyzed in a cylindrically shaped electrostatic analyzer with 30 cm radius and 6 mm electrode separation. As detector we will use segmented channelplate detectors or silicon strip detectors, providing about 1 mm position resolution, corresponding to an excellent energy resolution of 1 keV. The expected depth resolution is about 1 nm for an analyzing depth up to 100 nm.

We will discuss the feasibility of this method for the "non destructive" investigation of nanoscale multilayer thin films, interface and surface reactions. First experimental results will be presented.