Dresden 2006 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 7: Mechanical properties of thin films

DS 7.1: Vortrag

Montag, 27. März 2006, 16:00–16:15, GER 38

Characterization, mechanistic study and mechanical properties of diamond/ß-SiC nano-composite thin films — •Venkata Satya Siva Srikanth Vadali, Thorsten Staedler, and Xin Jiang — Institute of Materials Engineering, University of Siegen, Paul-Bonatz-Str. 9-11, 57076 Siegen, Germany

Diamond thin films often feature poor adhesion on many substrates due to high mechanical stresses induced by a difference in the thermal expansion coefficient between the diamond film and the substrate. One option to overcome this difficulty is to prepare composite films consisting of diamond and a second phase. In this work the synthesis of smooth nanocrystalline diamond/ß-SiC composite films, which are prepared by a microwave plasma assisted chemical vapor deposition process usually used to deposit pure diamond films in combination with the introduction of tetramethylsilane (TMS), will be reported. The composition of the films is controlled by adjusting the TMS concentration in the reaction gas. Changing the TMS flow during a deposition process even allows for gradient composite layers. The morphology and the crystallographic structure of these composite films were characterized by SEM, XRD and Raman spectroscopy. The surface roughness of the films was analysed by AFM. Both, hardness and friction co-efficient values of films prepared with various TMS flow rates were obtained using nanoindentation techniques and will be discussed.