Dresden 2006 – scientific programme

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DS: Dünne Schichten

DS 7: Mechanical properties of thin films

DS 7.2: Talk

Monday, March 27, 2006, 16:15–16:30, GER 38

Phase stability in ultra thin multilayer systems containing Zr, Ta, Nb, Mo and Fe or Fe(Zr) alloy layers — •Andreas Grob, Mohammad Mujeebuddin, and Ulrich Herr — Universität Ulm, Abteilung Werkstoffe der Elektrotechnik, Albert-Einstein-Allee 47, 89081 Ulm

The properties of binary ultra thin multilayer systems undergo significant changes with respect to the bilayer period. Depending on the selected material combination for the constituent single layers structural, elastic and magnetic properties are affected. Various investigation techniques such as x-ray reflectometry, x-ray diffraction, magnetometry and surface acoustic wave measurements have been carried out on multilayer systems prepared by DC magnetron sputtering under high vacuum conditions. The systems studied consisted of Zr, Ta, Nb and Mo as one layer material and Fe or an iron-rich Fe-Zr alloy as the other layer respectively. The results indicate the stabilization of amorphous phases due to the large interface to volume ratio. With increasing layer thickness a transition from amorphous to crystalline phase is observed in many cases. For some material combinations the phase transitions are accompanied by large changes in elastic properties compared to continuum elasticity theory calculations of the average elastic properties expected for the corresponding multilayers. Additionally a thermodynamic model is used to predict the phase stability for different single layer thickness.