Dresden 2006 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 9: Poster I

HL 9.40: Poster

Montag, 27. März 2006, 15:15–17:45, P3

Integral electrical and micro-electrical investigations of ZnO thin films — •H. von Wenckstern, M. Brandt, H. Schmidt, G. Zimmermann, R. Johne, J. Lenzner, H. Hochmuth, M. Lorenz, and M. Grundmann — Universität Leipzig, Institut für Experimentelle Physik II, Linnéstraße 5, 04103 Leipzig

ZnO thin films grown by pulsed-laser deposition on sapphire substrates are investigated by integral electrical and micro-electrical methods. Temperature dependent Hall measurements yield the dominant scattering mechanisms and the thermal activation energy of dominant donors. The results obtained from this integral method are compared to surface properties investigated on the nanometer scale. For that, atomic force microscopy, scanning capacitance microscopy, scanning surface potential microscopy, and scanning electron microscopy measurements are used. Further, the influence of a degenerate layer at the sapphire/ZnO interface on the determination of transport properties is discussed thoroughly in this contribution.