Dresden 2006 – wissenschaftliches Programm
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MM: Metall- und Materialphysik
MM 43: Diffusion III
MM 43.4: Vortrag
Freitag, 31. März 2006, 13:15–13:30, IFW B
Surface nano-structural modifications in Mo by nitrogen ion implantation as a function of temperature — •Hadi Savaloni1,2, Mariam Motmaen Dadgar2, Mahmood Ghorannevis2, and Mohamad-Reza Hantehzadeh2 — 1Dept. Of Physics, University of Tehran, North-Kargar Street, Tehran, Iran — 2Plasma Physics Research Center, Science and Research Campus of I. A. University, P. O. Box 14665-678, Tehran, Iran.
The structural characteristics of nitrogen ion implanted MO massive samples (0.5 mm foils) are studied by SEM, XRD, AFM, and SIMS. 20 KeV nitrogen ions with a dose of 1× 1018 N+ cm−2 were implanted in Mo samples at different temperatures. XRD patterns clearly showed MoN(031) line very close to Mo(200). AFM images showed the formation of grains on Mo samples, which grew in size with temperature. The surface roughness variation with temperature, decreased to a minimum, and further increase in temperature increased the surface roughness. SIMS analysis of the density of implanted N+ ions, and the depth of N+ ion implantation in Mo, showed a minimum for both the N+ density and depth of N+ ions, at a certain temperature consistent with XRD results (i.e., IMo(200) /IMo(211) and IMoN(031) /IMo(200)). These observed minimums in XRD and SIMS results are again similar to those obtained for N+ ion implanted W (Savaloni et al., 2005) and for XRD results in different thin films(Physica B, 349(2004)44; Vacuum, 77(2005)245).