Dresden 2006 – scientific programme

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O: Oberflächenphysik

O 29: Poster session II (Nanostructures, Magnetism, Particles and clusters, Scanning probe techniques, Time-resolved spectroscopy, Structure and dynamics, Semiconductor surfaces and interfaces, Oxides and insulators, Solid-liquid interfaces)

O 29.27: Poster

Wednesday, March 29, 2006, 14:30–17:30, P2

Particle removal by laser-induced acoustic waves — •Tobias Geldhauser, Florian Ziese, Johannes Boneberg, and Paul Leiderer — University of Konstanz, Fach M676, Universitaetsstrasse 10, 78457 Konstanz

Different approaches can be used for particle removal from surfaces like ultra-/megasonics or Dry / Steam Laser Cleaning. Here we analyze an alternative approach where a laser pulse hits the back of a wafer and thereby initiates a bulk acoustic wave which travels towards the wafer surface, leading to surface displacements and particle removal. We relate the cleaning efficiency for colloidal contaminants of different diameters (measured by light scattering) to the surface expansion, and hence the acceleration, which is measured with a ns-time-resolved Michelson Interferometer. Furthermore the backside configuration is modified by sacrificial layers in order to enhance the intensity of the acoustic wave.