Dresden 2006 – scientific programme
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O: Oberflächenphysik
O 33: Scanning probe techniques III
O 33.3: Talk
Thursday, March 30, 2006, 11:45–12:00, PHY C213
Calibration and optimization of scanning conditions in combined scanning thermal microscopy and scanning thermoelastic microscopy — •Dirk Dietzel1, Sutharat Chotikaprakhan2, Ralf Meckenstock2, Detlef Spoddig2, and Josef Pelzl2 — 1Physikalisches Institut, Universität Münster, 48149 Münster — 2Experimentalphysik 3, Ruhr Universität Bochum, 44780 Bochum
In this contribution we will present a combined experimental set-up for the simultaneous detection of the thermal and thermoelastic signal of electrically heated semiconductor devices by scanning probe techniques. The simultaneously obtained signal profiles of the Scanning Thermal Microscope (SThM) and the Scanning Thermoelastic Microscope (SThEM) give information on the shape and position of heat sources, where the combination of the two detection schemes gives a more precise set of parameters describing the heat sources and the temperature distribution in the sample. Additionally, two new techniques related to SThEM are presented: 1) a simple and straightforward calibration technique for the modulated surface expansion by force distance spectroscopy measurements using a electrically heated tip and 2) the optimisation of the scanning conditions by performing SThEM measurements on the 2nd harmonic resonance frequency of the cantilever. Using this technique on a high power capacitor structure a significant increase of the sensitivity can be achieved, which allows faster scanning or the detection of smaller surface oscillations (e.g. from subsurface heat sources).