Dresden 2006 – wissenschaftliches Programm
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TT: Tiefe Temperaturen
TT 7: Superconductivity & Solids At Low Temperature - Poster Session
TT 7.46: Poster
Montag, 27. März 2006, 14:00–17:45, P1
Fabrication of high stability shadow masks for complex hybrid structures — •Markus Gaaß1, Marco Aprili2,3, Peter Tranitz1, Werner Wegscheider1, and Christoph Strunk1 — 1Institut für Experimentelle und Angewandte Physik, Universität Regensburg, D-93040 Regensburg — 2CSNSM-CNRS, Université Paris Sud, Orsay, France — 3LPQ-ESPCI, 75005 Paris, France
We have developed and optimized a new thermostable mask system for shadow evaporation of refractory metals like Nb. The mask system consists of a PES sacrificial layer on which a 50nm thick Si3N4 film is deposited by PECVD at 275∘C. The SiN is then covered with PMMA resist and patterned using conventional electron beam lithography and reactive ion etching with CHF3. A free standing SiN-mask is created by removal of the PES with an isotropic etch in an oxygen plasma. The resulting masks are thermally and mechanically extraordinarily stable and show only minor deformations after deposition of 100nm Nb. This allows the fabrication of shadow masks for complex hybrid structures using angle evaporation techniques. We present first experiments on the magnetic response of superconducting loops with embedded ferromagnetic Josephson junctions using this technique.