Dresden 2006 – scientific programme
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VA: Vakuumphysik und Vakuumtechnik
VA 1: Vacuum coatings
Monday, March 27, 2006, 10:00–10:40, HSZ 101
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10:00 | VA 1.1 | Invited Talk: High performance coatings for UV and EUV (Next Generation Lithography) — •Norbert Kaiser |