Dresden 2006 – scientific programme

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VA: Vakuumphysik und Vakuumtechnik

VA 1: Vacuum coatings

Monday, March 27, 2006, 10:00–10:40, HSZ 101

	10:00	VA 1.1	Invited Talk: High performance coatings for UV and EUV (Next Generation Lithography) — •Norbert Kaiser