Frankfurt 2006 – scientific programme
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Q: Quantenoptik und Photonik
Q 20: Photonische Kristalle I
Q 20.6: Talk
Tuesday, March 14, 2006, 11:55–12:10, HI
Characterization of macroporous silicon devices for Photonic Crystal-based spectroscopic gas sensors — •Stefan L. Schweizer1, Torsten Geppert2, Andreas von Rhein1, Daniel Pergande1, and Ralf B. Wehrspohn1 — 1Dept. Physik, Universität Paderborn, 33095 Paderborn — 2MPI Halle, 06120 Halle
Photonic crystals (PhC) offer the potential to allow the realization of compact spectroscopic gas sensors. The working principle is based on low group velocities. However, the fabrication of corresponding PhC structures is demanding. We improved the macroporous Si fabrication process to fabricate promising structures. Growth of deep (450 µm) trenches next to ordered macropore arrays was successfully achieved during photo-electrochemical etching. In addition, this approach allows in-situ realization of an efficient coupling scheme of low group velocity modes as well as manual separating of the gas sensor devices with sub-µm precision. Transmission through macroporous Si PhCs of several hundred pore rows has been achieved. Homogeneity issues related to this are also discussed.