Düsseldorf 2007 – scientific programme

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K: Fachverband Kurzzeitphysik

K 9: Pulsed Power - Gasdynamik

K 9.2: Talk

Wednesday, March 21, 2007, 16:45–17:00, 6E

A novel solid state pulsed power module for excimer laser — •Claus F. Strowitzki — Coherent München, Zielstattstrasse 32, 81379 München

The design of solid state pulsed power modules for excimer lasers are established for many years. The primary switch is normally a high power IGBT, a step up transformer and two or three pulse compression stages. To overcome the problems of resetting and cooling of the pulse compressions stages a novel design for extremely high repetitions rate (10kHz) low energy (2mJ) excimerlaser pulsed power module is proposed. The pump energy for the laser tube is switched by a stack of semiconductor switches without step up transformer or pulse compression. The principal design, simulation results and first measurements are shown.