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P: Fachverband Plasmaphysik

P 16: Poster

P 16.11: Poster

Mittwoch, 21. März 2007, 16:30–18:30, Poster A

correlation of surface functionalization effects and gas phase composition of ammonia plasmas determined by laser induced fluorescence (LIF), optical emission spectroscopy (OES) and x-ray photoelectron spectroscopy (XPS) — •Shrouk El-Ashry, Antje Quade, Rüdiger Foest, and Andreas Ohl — Institut für Niedertemperatur Plasmaphysik INP, Felix-Hausdorff-str.2,17489 Greifswald, Germany

NH2 gas phase radicals are assumed to play a key role within the complex gas phase and surface chemistry of plasma assisted amino group (-NH2) functionalization on polymer surfaces using ammonia plasma. However, up to now very few attempts are known to experimentially validate this assumption. Here we report laser induced fluorescence (LIF) experiments in combination with surface diagnostics by X-ray photoelectron spectroscopy (XPS) to detail the type of correlation between the density of these gas phase radicals and amino group generation. For this purpose a LIF experiment was set up which provides good conditions for ground state NH2 relative radical density determination and, in parallel, for amino group detection. Basically, it consists of a cylindrical quartz tube with symmetric capacitively coupled RF plasma excitation. For LIF, excitation lines and special detection scheme were chosen in a way that suppression of the influence of plasma emission and of stray light from the excitation is posssible. Plasma process parameters study showed that there is a direct correlation between gas phase NH2 and surface NH2 for pressure and power processes but not for flow rate variation.