Düsseldorf 2007 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 16: Poster
P 16.18: Poster
Mittwoch, 21. März 2007, 16:30–18:30, Poster A
Influence of plasma parameters in kinetic modeling of the B-N-H-F-system — •Sarah Panowitz, Jens Matheis, and Achim Lunk — Institut für Plasmaforschung, Universität Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart
On behalf of the great variety of species in plasma enhanced chemical processes a screening of the most important processes with help of modelling seems to be necessary. In the case of B-N-F-H about 380 thermodynamic data on possible reactions without plasma are known. Unfortunately the reaction rates for kinetic modelling without and with plasma are barely. In the contribution we present and discuss calculations for the deposition of boron nitride in the B-N-H-F-system performed with the program CHEMKIN. This program offers the possibility to calculate reactions at thermodynamic equilibrium as well as to model kinetics of reaction both with and without consideration of plasma processes. Part I of the contribution presents calculations in the thermodynamic equilibrium. The set of thermodynamic data will be discussed and the mole fraction of BN is given in dependence on different fluxes of B, N, H and F. The results are compared to experimental ones. The ionization degree of the plasma was varied between 10−3 < x < 10−2. Part II presents the data set for kinetic modeling and gives results of BN-growth rate in dependence on gas composition and plasma parameters. The plasma parameters were measured by Langmuir probe. Selected results of these measurements are also shown.