Düsseldorf 2007 – scientific programme
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P: Fachverband Plasmaphysik
P 16: Poster
P 16.23: Poster
Wednesday, March 21, 2007, 16:30–18:30, Poster A
Particle-in-cell Monte Carlo model for oxygen discharges — •Franz Xaver Bronold1, Konstantin Matyash2, David Tskhakaya3, Ralf Schneider2, and Holger Fehske1 — 1Institut für Physik, Ernst-Moritz-Arndt Universität Greifswald, D-17489 Greifswald, Deutschland — 2Max-Planck-Institut für Plasmaphysik, Teilinstitut Greifswald, D-17491 Greifswald, Deutschland — 3Institut für Theoretische Physik, Universität Innsbruck, A-6020 Innsbruck, Österreich
We present a one-dimensional particle-in-cell Monte Carlo model for a capacitively coupled radio-frequency discharge of oxygen. Our model, which treats space charge fields, transport processes, and the most important plasma-chemical reactions of an oxygen discharge on an equal footing, determines for given bias voltage and pressure, discrete representations for the electric potential and the distribution functions for the charged particles. The density profiles, which we obtain from the distribution functions, in particular, the thickness of the sheaths and the electro-negativity in the center of the discharge, are in excellent agreement with experimental data indicating that our model captures essential aspects of an oxygen discharge. From the analysis of the distribution functions it is moreover possible to understand why in a radio-frequency oxygen discharge ion density fronts and internal sheaths, which are typical for discharges of electro-negative gases, are for some bias voltages and pressures more pronounced than for others.