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P: Fachverband Plasmaphysik

P 22: Poster

P 22.14: Poster

Donnerstag, 22. März 2007, 16:30–18:30, Poster A

Numerical and Experimental Investigations of the RF Plasma Boundary Sheath — •Brian Heil¹, Julian Schulze¹, Thomas Mussenbrock², Ralf Peter Brinkmann², Dirk Luggenhölscher¹, and Uwe Czarnetzki¹ — ¹Ruhr-Universität Bochum, Institut für Experimentalphysik V, Gebäude NB 05/692, D-44780 Bochum, Deutschland — ²Ruhr-Universität Bochum, Lehrstuhl für Theoretische Elektrotechnik, Gebäude IC-FO, Etage 05, D-44780 Bochum, Deutschland

A numerical model has been developed as a tool to study the dynamics of electrons in the RF Plasma boundary sheath. A fluid module is first used to calculate the time-dependant electric field and particle densities in the sheath. The electric field from this module is then used by an electron Monte-Carlo simulation, which calculates the time-dependant Electron Velocity Distribution Function (EVDF). For the verification of the model and its results, a comparison with experimental results is made using several different diagnostics. Flourescence Dip Spectroscopy (FDS) will be used to measure the time-dependant electric field directly, the time dependant spectral emissions in the sheath will be compared against emissions calculated using the EVDF, and the EVDF will be compared against Langmuir probe measurements. This research has been supported by: SFB 591, GK 1051.