Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 13: Thin Film Analytics II

DS 13.2: Vortrag

Dienstag, 27. März 2007, 15:30–15:45, H34

Low-level hydrogen profiling with RNRA — •Johannes Bosman, Michael Uhrmacher, Holger Schebela, Carsten Ronning, and Hans Hofsäß — II. Institute of Physics, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany

Our intention is to detect hydrogen and its profile in thin films. We will use the resonant nuclear reaction analysis method (RNRA) to achieve this aim, because it is difficult or rather impossible with other methods like RBS, XPS, AES or SIMS. We utilise the nuclear reaction ¹H(¹⁵N, αγ)¹²C, which means, that an accelerator providing a ¹⁵N-beam with energies up to 7 MeV is neccessary. The tandem accelerator facility at the II. Institute of Physics includes a so called ’Amsel-deflector’ system and a low-level measurement unit, whose combination affords the required non-destructive ion beam method, which enables H-profiling with RNRA. The depth resolution is 2 nm at the surface and 10 nm in the maximum analysing depth of 400 nm. A H-concentration of 450 ppm is detectable using a measuring time of 1 min per energy setting. We analysed ta-C:H layers with a thickness of 100 nm grown by mass separated ion beam deposition (MSIBD) using 100 eV C₂H₂-ions. The optical properties, measured by Raman and FTIR, will be correlated to the H-content. These first experiments and results will be discussed.