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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.18: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

A transmission electron microscopy study of TiO₂ thin films epitaxially grown on SrTiO₃ and yttria-stabilized zirconia substrates — •Andriy Lotnyk, Stephan Senz, and Dietrich Hesse — Max Planck Institute of Microstructure Physics

Anatase and mixed (brookite and anatase) TiO₂ thin films deposited on SrTiO₃ (STO) and yttria-stabilized zirconia (YSZ) substrates, respectively, by reactive electron beam evaporation were investigated using high-resolution transmission electron microscopy (HRTEM) and electron diffraction analysis (ED). HRTEM and ED insvestigations showed that epitaxial anatase thin films were grown on the (100)- and (110)-oriented STO substrates. The anatase thin films consist of grains with low angle grain boundaries showing a rather perfect microstructure of the films. Defects, such as misfit dislocations were found near the anatase/STO interface. The anatase films were transformed into a cubic structure similar to TiO when extensively exposed to the 400 keV electron beam. The crystallographic reason for the epitaxy between anatase films and a perovskite substrate is given. On the other hand, HRTEM insvestigations showed that a film deposited on (100)-oriented YSZ substrates at a substrate temperature of 600^∘C consist of mixed epitaxial anatase and brookite grains. (112) anatase twins were found in the film.