Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.21: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Roughness of laser deposited metal / metal oxide layered structures — •Tobias Liese, Andreas Meschede, Johanna Röder, and Hans-Ulrich Krebs — Institut für Materialphysik, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen
The roughness of laser deposited Ti/MgO and Ag/ZrO2 layered thin films were investigated by atomic force microscopy (AFM) and X-ray reflectivity (XRR), which are sensitive on the surface and interface roughness, respectively. When depositing the metals, nucleation and island growth occur which first roughen the surfaces with increasing layer thickness. Then, coalescence and island zipping processes reduce the roughness again. Minimal roughness is reached, when the metal layers are just closed. In both systems, the deposition of the metal oxide leads to layer smoothing. The underlying growth processes for single and double layers as well as the reduction of roughness in multilayers are discussed.