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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.25: Poster
Tuesday, March 27, 2007, 15:00–17:00, Poster B
Speciation of carbonitride nanolayers — Olaf Baake1, Peter Hoffmann1, Andreas Klein1, Wolfgang Ensinger1, •Beatrix Pollakowski2, Burkhard Beckhoff2, Jan Weser2, Gerhard Ulm2, Nadeshda Fainer3, Marina Kosinova3, and Valentina Trunova3 — 1TU Darmstadt, Materials Science, Petersenstr. 23, 64287 Darmstadt, Germany — 2Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany — 3Nikolaev Institute of Inorganic Chemistry SB RAS, 630090 Novosibirsk, Russia
The aim of this work is the determination of the chemical bonds character of novel and technologically relevant layered systems of boron and silicium carbonitrides. Carbonitrides are mainly produced by plasma-enhanced chemical vapor deposition processes with various kind of precursor materials. Having yet not fully understood the behavior of these materials there are still important questions like whether the produced carbonitrides are new materials with well-defined bonds or simply mixtures of carbide and nitrides.
For their speciation, methods like total reflection X-ray fluorescence combined with near edge X-ray absorption fine structure (TXRF-NEXAFS) and X-ray photoelectron spectroscopy (XPS) were employed. Both techniques can substantially contribute to the clarification of the chemical bond structure of the given carbonitride samples.