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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.25: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

Speciation of carbonitride nanolayers — Olaf Baake¹, Peter Hoffmann¹, Andreas Klein¹, Wolfgang Ensinger¹, •Beatrix Pollakowski², Burkhard Beckhoff², Jan Weser², Gerhard Ulm², Nadeshda Fainer³, Marina Kosinova³, and Valentina Trunova³ — ¹TU Darmstadt, Materials Science, Petersenstr. 23, 64287 Darmstadt, Germany — ²Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany — ³Nikolaev Institute of Inorganic Chemistry SB RAS, 630090 Novosibirsk, Russia

The aim of this work is the determination of the chemical bonds character of novel and technologically relevant layered systems of boron and silicium carbonitrides. Carbonitrides are mainly produced by plasma-enhanced chemical vapor deposition processes with various kind of precursor materials. Having yet not fully understood the behavior of these materials there are still important questions like whether the produced carbonitrides are new materials with well-defined bonds or simply mixtures of carbide and nitrides.

For their speciation, methods like total reflection X-ray fluorescence combined with near edge X-ray absorption fine structure (TXRF-NEXAFS) and X-ray photoelectron spectroscopy (XPS) were employed. Both techniques can substantially contribute to the clarification of the chemical bond structure of the given carbonitride samples.