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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.37: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

Annealing behaviour of hydrogenated and oxidized nanocrystalline diamond — Maxim Eremtchenko¹, Jens Uhlig¹, Martin Finsterbusch¹, •Roland Koch¹, Anita Neumann¹, Syed Imad-Uddin Ahmed¹, Jose A. Garrido², Martin Stutzmann², and Juergen A. Schaefer¹ — ¹Institut für Physik und Institut für Mikro- und Nanotechnologien, Technische Universität Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany — ²Walter Schottky Institute, Technical University Munich, Am Coulombwall 3, D-85748 Garching, Germany

Hydrogenated and oxidized Nanocrystalline Diamond (NCD) is a very promising material for future electronic, especially bioelectronic applications. In the past it has been shown that hydrogen, oxygen, and gases from the ambient environment as well as water can be responsible for causing drastic changes in surface conductivity and wettability (hydrophobicity, hydrophilicity), friction, wear, etc. In this contribution we have investigated differently prepared NCDs as function of the annealing temperature under ultrahigh vacuum conditions (UHV) with various electron spectroscopies like UPS and XPS as well as High Resolution Electron Energy Loss Spectroscopy (HREELS). We were able to identify the thermal stability of a number of different species at the interface, which are related to different characteristics of C-H, O-H, C-O, and C-C bonding. Finally, a carbonization of the interface appeared at higher annealing temperatures.