Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.38: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Measuring and tailoring the intrinsic stress in amorphous carbon films — •Oleksiy Filipov, Nicolas Woehrl, and Volker Buck — Thin Film Technology Group, Dept. of Physics, University of Duisburg-Essen, Universitätsstr. 3-5, 45141 Essen, Germany
Amorphous hydrogenated carbon a-C:H and non-hydrogenated a-C films are DLC materials characterized by attractive mechanical, optical and chemical properties. One of the biggest problems that affect the application of the DLC films is a very high compressive stress developed during the film deposition. Intrinsic stress is a critical parameter in thin film deposition and very important for different applications of DLC films especially tribological and biomedical coatings.
In order to adjust DLC films properties, they were deposited in UHV chamber onto different types of substrates such as a glass, polished Si(100) and steel by using PVD DC-anodic arc deposition method. The intrinsic stress in the deposited DLC films was measured ex-situ by determining the substrate curvature using SSIOD method. The variation in process parameters such as substrate bias and gas admixture is used to investigate the influence onto the intrinsic stress of deposited films. The plasma parameters were monitored during deposition by ion energy analyser and mass-spectrometer. The structural properties of the deposited DLC films, mostly sp3/sp2 ratio, were characterized by Raman Spectroscopy and by FTIR.
It is shown that the intrinsic stress in the DLC films can be varied in a wide range from compressive to tensile just by variation of the deposition parameters.