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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.45: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

Optimization of optical properties of thermochromic VO₂ films — Ganhua Fu, •Jennifer Stiebich, Angelika Polity, Niklas Volbers, and Bruno Kurt Meyer — 1. Physikalisches Institut, Justus Liebig Universität Giessen

Vanadium dioxide shows a thermally induced semiconductor-metal phase transition at 68^∘C. Especially the related change in the optical properties enables many applications in infra-red light (IR)-switching or bolometric devices or as "intelligent" energy conserving window coating. For certain applications the transition temperature has to be tuned and the transmittance in the visible and infra-red spectral range should be optimized. An appropriate way to achieve the required properties is doping. We studied a series of VO₂ layers prepared by radio frequency sputtering and doped by an additional solid in the target or by a reactive gas used in the deposition process. The optical switching properties were evaluated from wavelength and temperature dependent transmission measurements. The crystal structure of the films was studied by X-ray diffraction (XRD) and the composition of the layers was determined by energy-dispersive X-ray analysis (EDX) and secondary ion mass spectroscopy (SIMS).