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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.55: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

Nitriding of Fe-Cr-Ni thin films by ion implantation — •Darina Manova and Stephan Mändl — Leibniz-Institut für Oberflächenmodifizierung, Leipzig

Nitrding of austenitic stainless steel is a process leading to the formation of thick modified layers by an unusual fast nitrogen diffusion, which is investigated and applied for many years. Additionall, a varying nitrogen diffusion by 4 − 5 orders of magnitude is reported in the literature, depending on the microstructure. However the investigations are performed predominantly on rolled samples or heavily distorted bulk samples. Here, thin Fe-Cr-Ni films with a thickness of 500 nm and more were synthesized using ion beam sputter deposition from an austenitic stainless steel target (AISI 304, respective DIN 1.4301). Low energy implantation and plasma immersion ion implantation were performed to insert the nitrogen ions into the films at different temperatures and ion energies. The modified layers were investigated by SIMS, TEM and XRD. The diffusion rate was calculated from SIMS measurements. The microstructural and phase composition changes were estimated from XRD and TEM measurements.