Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 27: Polymer and Composite Films

DS 27.6: Vortrag

Freitag, 30. März 2007, 10:45–11:00, H32

Smoothing of thin film surfaces and interfaces — •Johanna Röder, Tobias Liese, Britta Lösekrug, and Hans-Ulrich Krebs — Institut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, D-37077 Göttingen

The control of surface and interface roughness is of great interest in technology especially for all kind of optical applications, e.g. x-ray mirrors. To obtain smooth surfaces with only sub-nanometer roughnesses, sputtering with energetic particles, etching, polishing or annealing are usually applied. In this contribution, different methods are discussed to smooth systems with island growth or artificial roughnesses of some nanometers produced before. Here namely Ag islands on PMMA or Si are smoothened by pre-deposition of nucleation sites and/or island zipping. Furthermore, it is shown that such surface roughnesses can significantly be reduced by covering the surface with metal oxide or polymer layers of different thicknesses. This smoothening technique can also be applied for surfaces with statistic roughness or periodic ripple formation created by sputter erosion or nano-structuring. The development of the microstructure and reduction of roughness was investigated via atomic force microscopy (AFM), transmission electron microscopy (TEM) and x-ray reflectivity (XRR). The smoothing mechanisms as well as the limits of smoothing will be discussed with respect to their dependencies on frequency and film thickness.