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Regensburg 2007 – scientific programme

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DS: Fachverband Dünne Schichten

DS 3: Metal Layers and Multilayers

DS 3.6: Talk

Monday, March 26, 2007, 10:45–11:00, H34

Investigation of the Mechanical Properties of Thin Iron and Molybdenum Films — •Andreas Schneider1, Gunther Richter2, Thomas Wübben2, and Eduard Arzt1,21Universität Stuttgart, Institut für Metallkunde, Heisenbergstraße 3, 70569 Stuttgart — 2Max-Planck-Institut für Metallforschung, Heisenbergstraße 3, 70569 Stuttgart

The mechanical properties of thin films and small structures with dimensions in the range of microns or below differ fundamentally from their bulk counterparts. Many experiments have shown that flow stresses of thin films are inversely related to the film thickness. However, so far this size effect has only been observed in fcc metal thin films. To date there is no evidence that thin films with a bcc crystal structure also show this effect. In the current investigation we want to shed light on this open question by studying the mechanical properties of thin α-Fe and Mo films. The films were deposited in ultra high vacuum conditions via molecular beam epitaxy and magnetron sputtering on different substrates. They were tested with the substrate curvature technique as well as micro tensile tests. Additionally, bulge tests on freestanding films were performed to eliminate the influence of the substrate. Our results show that the mechanical behavior of the films depends on the film thickness and the microstructure.

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