Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 9: Hard Coatings II

DS 9.4: Vortrag

Montag, 26. März 2007, 16:00–16:15, H34

Correlation of structural properties of DLC films to their mechanical and optical properties — •Oleksiy Filipov, Alexei Poukhovoi, Nicolas Woehrl, and Volker Buck — Thin Film Technology Group, Dept. of Physics, University of Duisburg-Essen, Universitätsstr. 3-5, 45141 Essen, Germany

Diamond-like carbon films refers to a form of amorphous carbon a-C and hydrogenated amorphous carbon a-C:H containing a sizeable fraction of sp3 bonding, which makes them mechanically hard, infrared transparent and chemically inert. But DLC films have a big drawback high residual stress. In order to adjust stress and investigate properties of deposited films, DLC films were deposited onto different types of substrates like glass to investigate optical properties, Si and steel to investigate structural and mechanical properties, by using different deposition methods such as PVD DC-anodic arc and CVD RF-plasma. Both deposition methods allow us independently adjust substrate bias and gas admixture in order to influence the film properties. The structural properties of the films were characterized by Raman and FTIR spectroscopies. The optical properties of the films were ex-situ examined by UV-IR spectroscopy. The intrinsic stress was measured ex-situ by determining the substrate curvature using SSIOD method. It was shown correlation between structural and optical properties of deposited films and influence of deposition parameters onto intrinsic stress. The influence of hydrogen flow rate on film properties was also shown.