Regensburg 2007 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 13: Poster 1

HL 13.69: Poster

Montag, 26. März 2007, 15:00–17:30, Poster A

Optical and electrical properties of sputtered copper oxide thin films — •Swen Graubner, Stefan Merita, and Bruno Meyer — I. Physikalisches Institut, Justus-Liebig-Universität Giessen, Heinrich-Buff-Ring 16, 35392 Giessen

In order to promote the understanding of CuxO sputtering, we deposited several series of thin-films under various conditions. Substrate temperature was changed, ranging from room temperature to 700 K. Argon and oxygen flow were varied in the region of up to 5 sccm. The morphology of the deposited CuxO thin-films was investigated by x-ray diffraction, EDX and REM. It could be shown that the oxygen flow directly influences whether Cu(II)O or CuO is formed. Electrical measurements were done to gain information about specific resistivity, carrier concentration and mobility. Optical absorption and transmission experiments gave information about the band-edge properties of the investigated CuxO thin films.