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HL: Fachverband Halbleiterphysik

HL 14: Si/Ge

HL 14.6: Vortrag

Montag, 26. März 2007, 17:15–17:30, H14

Functional Spin-Coated Nanocrystalline Silicon Layers on Plastic Substrates — •Robert Lechner¹, Roland Dietmüller¹, Andre R. Stegner¹, Rui N. Pereira¹, Martin S. Brandt¹, André Ebbers², Frank-Martin Petrat², Martin Trocha², Hartmut Wiggers³, and Martin Stutzmann² — ¹Walter Schottky Institut, Technische Universität München, Am Coulombwall 3, 85748 Garching — ²Degussa AG, Paul-Baumann-Str. 1, 45764 Marl — ³Universität Duisburg-Essen, Institut für Verbrennung und Gasdynamik, Lotharstr. 1, 47048 Duisburg

Semiconducting silicon nanoparticles are possible candidates for various applications in the field of printable electronics and for low cost solar cells. Its natural abundance and non-toxicity make silicon the favorable choice out of a large variety of nanoparticle materials which in principle enable high carrier mobility and stability under atmospheric conditions.

Here, we present results obtained by pulsed laser annealing of spin-coated silicon nanoparticle dispersions on flexible plastic substrates. These nanoparticles are successfully doped during their formation in a microwave reactor by the addition of diborane and phosphine to the precursor gases. The structural properties of the films before and after the laser treatment are discussed and the conductivity is found to increase by several orders of magnitude. Furthermore, spectrally resolved photoconductivity allows a detailed analysis of electronic transport in spin-on nanoparticular silicon films. In addition, device concepts based on these films will be discussed.