Regensburg 2007 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 35: Devices

HL 35.2: Vortrag

Donnerstag, 29. März 2007, 10:15–10:30, H13

MOSFET controlled Emission from Micro Field Emitter Tips — •Thomas Maul, Bernhard Fabel, Linda Nowack, Martin Sterkel, and Walter Hansch — Institute for Technical Electronics, Technical University Munich, Arcisstr. 21, 80333 Munich, Germany

Current stabilized field emitters are an ongoing subject to research and development for a couple of years, especially for flat panel displays. Alongside to this development field emitters are a promising candidate for economic multiplicative exposure of photo resists for nanostructures in future semiconductor manufacturing. As yet unrecoverable irregularities in manufacturing and resulting ageing of emitter tips during operation (e.g. combustion and adsorption of contaminations) lead to a drastic variance of emission between different tips and over time. So it is necessary to adjust the emission current in a different way. This submission shows ways to stabilize the current of field emitters by integrating emitter tips in drain contacts of MOSFETs and control the emission herewith. Experimental results are shown as well as simulations.