Regensburg 2007 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 5: Photovoltaic

HL 5.9: Vortrag

Montag, 26. März 2007, 13:00–13:15, H14

A Systematic Study on the Deposition of µm Thick CuInS₂ Spray ILGAR Layers — •Christian Camus, Daniel Abou-Ras, Nicholas Allsop, Wolfgang Bohne, Sophie Gledhill, Iver Lauermann, Martha Christina Lux-Steiner, Jörg Röhrich, and Christian-Herbert Fischer — Hahn-Meitner-Institut Berlin, Glienicker Str. 100, D-14109 Berlin

The Spray Ion Layer Gas Reaction (ILGAR) is a new non-vacuum process, well suited for roll-to-roll production. In the first step of the process a metal salt solution is sprayed onto a heated substrate. The resulting solid layer is converted to the metal sulfide by H₂S. Both steps are repeated until the desired thickness is achieved. Recently In₂S₃ buffer layers for highly efficient Cu(In,Ga)(S,Se)₂ solar cells have been deposited by this method. Now we have significantly extended the process and enabled the deposition of copper containing compounds, such as CuInS₂. By aerosol preheating, temperature optimization and the use of appropriate precursor-salts, the deposition rate has been increased from 3nm/cycle up to 35nm/cycle in order to achieve µm thick films needed for solar cells. However, in addition to CuInS₂, In₂O₃ was also detected, which was strongly reduced by H₂S-postanealing. Nevertheless, XPS-, ERDA-, SEM- and EDX-measurements still revealed some structural and chemical inhomogeneities. Thus several approaches like a reducing atmosphere were tested to further improve the layer quality. Working solar cells have been produced with these CuInS₂ absorber layers. Their optimization with respect to photovoltaic performance is in progress.