Regensburg 2007 – scientific programme

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MM: Fachverband Metall- und Materialphysik

MM 22: SYM Physics meets Industry

MM 22.11: Talk

Wednesday, March 28, 2007, 18:35–18:55, H16

Some new application aspects of scanning electron microscopy — •Hans-Georg Braun and Evelyn Meyer — Leibnitz Institute of Polymer Research Dresden, Max Bergmann Center of Biomaterials, D-01069 Dresden, Hohe Strasse 6

Scanning electron microscopy is a well established tool for the material scientist. Recent developments in SEM instrumentation allow the SEM operation at low (E<1 KeV) electron energies which overs remarkable possibilities in imaging ultrathin (t<10 nm) layers, especially polymer layers with high image contrast. In addition low operation voltage allows imaging of non-conducting materials such as polymer, ceramics or glass without electrical charging. The integration of tiny manipulation tools into the SEM makes the SEM a nano- or microlaboratory. The manipulation tools inside the SEM allow an interaction with the sample under direct observation at high magnifications. Tiny things can be moved, particles be separated and tools for measuring purpose can be adjusted under visual control.