Regensburg 2007 – scientific programme

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MM: Fachverband Metall- und Materialphysik

MM 22: SYM Physics meets Industry

MM 22.4: Talk

Wednesday, March 28, 2007, 15:45–16:05, H16

The Deposition Process of Nanoscaled Multilayer Coatings for X-ray Optics — •Frank Hertlein, Jörg Wiesmann, Alexandra Oehr, Steffen Kroth, and Carsten Michaelsen — Incoatec GmbH, Max-Planck-Str. 2, 21502 Geesthacht

Incoatec develops, produces and sells X-ray optics with optimized properties. The optics consist of bent substrates with shape tolerances below 100nm, upon which multilayers are deposited with single layer thicknesses in the nanometer range and up to several hundreds of layer pairs. Additionally these multilayers were designed with lateral thickness gradients within +-1% deviation of the ideal shape. This means that a deposition precision in the picometer range is needed.

The talk will highlight how Incoatec designs, produces and characterizes these optics. We use sputtering methods for deposition, optical profilometry in order to characterize the shape and X-ray reflectometry to characterize the multilayers. The talk will emphasize the possibilities and limits of different in-situ and ex-situ metrology methods when manufacturing X-ray optics. Finally, ideas for new high precision metrology methods will be outlined.