Regensburg 2007 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 22: SYM Physics meets Industry
MM 22.8: Vortrag
Mittwoch, 28. März 2007, 17:20–17:40, H16
Fabrication and Mechanical Properties of Metal Thin Films — •Thomas Wübben1, Gunther Richter1, and Eduard Arzt1,2 — 1Max-Planck-Institut für Metallforschung, Heisenberg-Str. 3, 70569 Stuttgart — 2Universität Stuttgart, Institut für Metallkunde, Heisenberg-Str. 3, 70569 Stuttgart
Nanoscale metallic materials and structures exhibit size-dependent mechanical properties, which deviate substantially from bulk values. Our research aims to understand and quantify this so-called size effect. Various experimental techniques have been established in our group over the last years. These include the classical substrate curvature technique as well as the newly developed in situ tensile tests with stress measurement by XRD methods. To retain control on quality and properties, all samples are produced in house by the thin film laboratory. This central scientific facility inside our institute offers different physical vapour deposition techniques, including magnetron sputtering and molecular beam epitaxy. An extensive data base of the mechanical properties of the technologically important metals Cu, Al and Ag could be built up this way. The presentation will give an overview about the production and testing possibilities in our group. It will finally highlight the major technical challenges for future research and what we request from industry.