Regensburg 2007 – scientific programme

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MM: Fachverband Metall- und Materialphysik

MM 37: Nano structured materials V

MM 37.2: Talk

Thursday, March 29, 2007, 17:00–17:15, H4

Functional surface nanostructures with highly-regular patterns, tunable properties and broad application potential — •Yong Lei and Gerhard Wilde — Institut für Materialphysik, Universität Münster, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany

Using a new surface nano-patterning technique - the UTAM (ultra-thin alumina mask) nano-patterning, ordered arrays of zero-dimensional nanostructures (such as e.g. CdSe nanodots or Si nanoholes) and one-dimensional nanostructures (such as e.g. carbon nanotubes or Ni nanowires) were fabricated on flat substrates. The ordered nanoparticles and nanoholes were prepared using vacuum evaporation processes and focused-ion-beam etching, respectively. The carbon nanotube arrays were initiated from UTAM-prepared catalyst (metal) nanoparticle arrays in a PECVD process. The feature size of the UTAM-fabricated surface nanostructures can be adjusted in the range of about 10-200 nm. The advantages of the UTAM surface nano-patterning, such as the achievement of tunable properties, large pattern area, high throughput and low equipment costs, make the technique quite suitable to fabricate ordered surface nanostructures with a broad range of potential applications ranging from optics and electronics applications to fabricating nanoscale devices. 1. Y. Lei, et al., Chem. Mater. 17, 580 (2005). 2. Y. Lei, W. K. Chim, H. P. Sun, G. Wilde, Appl. Phys. Lett. 86, 103106 (2005). 3. Y. Lei, et al., Nanotechnology 16, 1892 (2005). 4. G. Wilde, Surface and Interface Analysis 38, 1047 (2006). 5. Y. Lei, W. P. Cai, G. Wilde, Prog. Mater. Sci., in press (2007).