Regensburg 2007 – scientific programme

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O: Fachverband Oberflächenphysik

O 17: Poster Session I (Nanostructures at Surfaces; Metal Substrates: Epitaxy and Growth; Methods: Scanning Probe Techniques; Phase Transitions)

O 17.13: Poster

Monday, March 26, 2007, 17:30–20:30, Poster C

Fabrication of Clean Nanostructures on Metal Surfaces via Electron-Beam Induced Deposition — •Thomas Lukasczyk, Michael Schirmer, Hubertus Marbach, and Hans-Peter Steinrück — Lehrstuhl für Physikalische Chemie II, Universität Erlangen-Nürnberg, Egerlandstr. 3, D-91058, Erlangen

Electron-beam induced deposition (EBID) is a versatile method to produce well defined deposit structures in a controlled manner. Precursor molecules are decomposed via a sharp highly focussed electron beam, resulting in the deposition of the non-volatile fragments. In order to study EBID in an environment free of residual gases and to investigate its potential as a tool to generate pure nanostructured deposits, an ultra-high vacuum system is used. The integrated high resolution electron-column in combination with a lithographic package enables the controlled fabrication of nanostructures with lateral dimensions below 20 nm, which can be characterized via scanning electron microscopy, scanning tunneling microscopy and Auger electron spectroscopy. Iron pentacarbonyl, Fe(CO)₅, proved to be an effective precursor to generate iron structures of arbitrary shape on metal surfaces like rhodium or gold. Auger spectroscopy demonstrates a high purity of the deposits. The contamination level can be lowered even further by moderate heating. Exposure of the iron nanostructures to oxygen at elevated temperature leads to the formation of iron oxide, while the substrate surface remains almost unchanged. This demonstrates the capability to generate specific catalyst surfaces via EBID, which can be tuned to the requirements of certain reactions.