Regensburg 2007 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 66: Nanostructures at Surfaces VI (Surface Reconstructions)

O 66.4: Vortrag

Freitag, 30. März 2007, 11:00–11:15, H36

A Simplified Model for FIB Structuring I — •Andreas Stadler — Institut für Angewandte Physik und Zentrum für Mikrostrukturforschung, Jungiusstr. 11, 20355 Hamburg

Within the wide field of Nano-Technology, methods - as Focused Ion Beam (FIB) - which allow a well defined structuring of any material, have an outstanding position. Therefore the primary aim must be to minimize the producible structure-diameters. While a lot of effort has been undertaken to focus the ion beam, we have focused on the investigation of the influence of substrate parameters on structure diameters.

A 'non-numerical' model has been developed to comprehensibly interpret the measured structures. So called internal and external redepositions have been taken into account for dots, lines and two-dimensional structures.

Besides the parameters current and diameter of a Gaussian beam profile the influence of substrate parameters as density, molar mass and aspect ratio (structure depth versus beam diameter) on structure topography are shown. The effect of typical parameters for FIB processes as dose, step width and write cycle repetition on the morphology have been investigated.