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TT: Fachverband Tiefe Temperaturen

TT 1: Superconductivity - Fabrication and Characterization

TT 1.4: Vortrag

Montag, 26. März 2007, 10:15–10:30, H18

Masked ion-beam nano-patterning of high-T_c superconducting thin films — •Khurram Siraj¹, Johannes Pedarnig¹, Dieter Bäuerle¹, Herbert Richter², Wolfgang Lang², Renata Kolarova³, Peter Bauer³, Leopold Palmetshofer⁴, and Christine Hasenfuss⁴ — ¹Institut f. Angewandte Physik, Universität Linz, A-4040 Linz — ²Institut f. Materialphysik, Universität Wien, A-1090 Wien — ³Institut f. Experimentalphysik, Universität Linz, A-4040 Linz — ⁴Institut f. Halbleiter- und Festkörperphysik, Universität Linz, A-4040 Linz

High-T_c superconducting (HTS) thin films are especially interesting for future nano-electronic devices. Masked ion-beam structuring (MIBS) is a promising technique to fabricate artificial HTS thin film nano-structures in a direct and single-step process.

Irradiation of vicinal YBa₂Cu₃O_7−d (YBCO) thin films with light ions of low energy increases the normal state in-plane and out-of-plane resistivities and suppresses the critical temperature T_c without destroying the film crystal framework.

MIBS is employed for nano-structuring of YBCO thin films into lines, arrays and dots (size approx. 60 nm). Computer simulations (SRIM, MARLOWE) indicate that light-ion projection patterning can produce YBCO thin film nano-structures 10 nm in size.

This work is supported by the Austrian Science Fund FWF, the Micro@Nanofabrication Austria MNA Network (Austrian Federal Ministry for Economic Affairs and Labour), and the Higher Education Commission (HEC) Pakistan.