Regensburg 2007 – scientific programme

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Desorption mechanisms and vacuum generation

Monday, March 26, 2007, 11:15–13:00, H9

	11:15	VA 2.1	Invited Talk: Outgassing behaviour, morphology and surface composition of vacuum fired stainless steel — •Manfred Leisch
	12:00	VA 2.2	Ein analytisches Modell zur Beschreibung der Kompression von Wide Range Turbo-Molekularpumpen — Klaus Stepputat und •Gerhard Voss
	12:15	VA 2.3	Trockenverdichtende Schraubenvakuumpumpen in anspruchsvollen Applikationen — •Thomas Dreifert
	12:30	VA 2.4	Kalibrierung von Leckraten — •Wolfgang Jitschin
	12:45	VA 2.5	Process optimization from component-based Process Control to in-situ Advanced Process Control (APC) — •Benjamin Abraham and Gottfried Gerlach