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DS: Fachverband Dünne Schichten

DS 17: Poster: Trends in Ion Beam Technology, Magnetism in Thin Films, Functional Oxides, High-k Dielectric Materials, Semiconductor Nanophotonics, Nanoengineered Thin Films, Layer Deposition Processes, Layer Growth, Layer Properties, Thin Film Characterisation, Metal and Amorphous Layers, Application of Thin Films

DS 17.28: Poster

Tuesday, February 26, 2008, 09:30–13:30, Poster A

Controlling the formation of Nanoparticles for definite growth of Carbon Nanotubes — •Sascha Hermann, Stefan Schulz, and Thomas Gessner — TU Chemnitz, Center for Microtechnologies, Reichenhainer Strasse 70, 09126 Chemnitz, GERMANY

Our interest is the integration of carbon nanotubes (CNT) in electronic devices (IC, NEMS). This carbon material has some outstanding properties making it a promising candidate fulfilling future requirements for integrated circuit devices (ITRS). Among others we try to replace in a first step the vertical Cu- interconnect with CNT-wires. The requirements for this aim are very challenging as one has to achieve high density aligned CNT-growth with high conductivity at low temperature consistent with microelectronic processes lines (<450^∘C). In the scope of this work we present a study on the preparation of the catalyst Ni-particles from ultrathin films and the synthesis of carbon nanotubes by the chemical vapour deposition method. For the preparation we use a cold wall CVD-reactor especially designed for handling samples up to a size of a 4 inch wafer. We show the influence of temperature and substrate material on particle formation focusing on optimization of size distribution and density. Furthermore, we present MWNTs grown at temperatures even as low as 500^∘C. The nanotubes were characterized by scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy.