Berlin 2008 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 23: High-k Dielectric Materials - Synthesis, Properties, Applications
The posters can also be presented at Poster A on Tuesday morning (DS poster session).

DS 23.3: Poster

Mittwoch, 27. Februar 2008, 18:30–20:30, Poster C

Solvothermal sol-gel process for synthesis of Ba_0.5Sr_0.5TiO₃ — •Dirk Spitzner¹, Emanuel Gutmann¹, Boris Mahltig², and Dirk C. Meyer¹ — ¹TU Dresden, Institut für Strukturphysik, 01062 Dresden — ²Gesellschaft zur Förderung von Medizin-, Bio- und Umwelttechnologien, GMBU e.V., Department: Functional Coatings, Postfach 520165, 01317, Dresden

In the solid solution of barium strontium titanate (BST) the transition temperature from the paraelectric to ferroelectric phase and hence the electrical properties can be tuned over a wide range, what is of interest for various electronic applications. Beside vacuum deposition methods, thin films of BST can be synthesized by chemical solution deposition. We modified a classic sol-gel deposition process using barium-, strontium-acetate and titanium-isopropoxide as precursor in acetic acid and acetylacetone by introducing a solvothermal treatment of as-synthesized sols. The decomposition and crystallization behaviour in the resulting powders and films were analyzed by thermal analysis (TG, DTA), X-ray diffraction and X-ray reflectometry. In comparison to untreated sols a different transition behaviour is observed when the sols are prepared by using a solvothermal procedure.