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DS: Fachverband Dünne Schichten

DS 30: Layer Properties: Electrical, Optical and Mechanical Properties

DS 30.5: Vortrag

Donnerstag, 28. Februar 2008, 10:30–10:45, H 2032

Co-deposition of energetic carbon and Copper ions: Self-organization of multilayers — •Hayo Zutz¹, Dominika Lyzwa¹, Inga Gerhards¹, Carsten Ronning¹, Michael Seibt², and Hans Hofsäss¹ — ¹II. Physikalisches Institut, Universität Göttingen, Friedich-Hund-Platz 1, 37077 Göttingen — ²IV. Physikalisches Institut, Universität Göttingen, Friedich-Hund-Platz 1, 37077 Göttingen

Multilayers grown by simultaneously deposition of carbon and Fe, Au, Cu or Ni ions reveal a self-organization process with alternately metal-rich and metal-deficient layers. The periodicities of these layers are of the size of a few nanometers. The metal-rich layers consist of crystalline clusters in an amorphous carbon matrix, while the metal-deficient ones of amorphous carbon with homogeneous distributed metal atoms. The concentration vs. depth distributions of the metal atoms were analyzed by Rutherford backscattering spectroscopy (RBS) and energy dispersive X-ray (EDX) spectroscopy measurements, while the structure of the films was examined via cross-section transmission electron microscopy (TEM). The results are in agreement with a model of the multilayer formation based on an interplay of sputtering, surface segregation, ion induced diffusion, and the stability of small clusters against ion bombardment. The optical absorption of these films was analyzed in the UV-Vis range with respect to the Cu content and the cluster size determined by X-ray diffraction (XRD) analysis.