Berlin 2008 – scientific programme
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DS: Fachverband Dünne Schichten
DS 31: Application of Thin Films
DS 31.1: Talk
Thursday, February 28, 2008, 11:15–11:30, H 2032
Piezoelectric thin film devices for biochip applications — •Kerstin Wätje1,2, Jens Ebbecke1,2,3, and Achim Wixforth1,2 — 1Universität Augsburg, Lehrstuhl für Experimentalphysik I, 86159 Augsburg — 2Center of Nano Science, Geschwister-Scholl-Platz 1, 80539 München — 3School of Engineering and Physical Science, Heriot-Watt University, Edinburgh, EH14 4AS, United Kingdom
"Lab-on-a-chip-devices" are well suited for the analysis of least amounts of liquids. Therefore, such systems are emerging from prototype status and cost effective materials for mass production are sought. For handling and mixing components, surface acoustic waves generated by piezoelectric elements are meanwhile routinely employed; however, the LiNbO3 single crystals usually used in such units are a significant cost factor. As an alternative, zinc oxide layers deposited onto glass substrates hold the promise of cheaper production and easier integration into the assembly. In the present study, experiments regarding the deposition of such layers using different plasma processes are presented. Film synthesis was performed using rf magnetron sputtering, pulsed laser deposition and plasma based ion bombardment of Sol-Gel films on crystalline and amorphous substrates. The impacts of significant deposition parameters are discussed. At optimum deposition parameters, excellent columnar growth in the preferred c-axis orientation could be observed. The suitability of such films for the desired biochip application is substanciated through first mixing experiments using optically lithographed interdigital transducers (IDTs).