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DS: Fachverband Dünne Schichten

DS 34: Hard and Superhard Coatings

DS 34.3: Vortrag

Donnerstag, 28. Februar 2008, 16:15–16:30, H 2032

Scanning probe microscopy based characterization of reactive sputter deposited coatings — •Thomas Klünsner¹, Gregor Hlawacek¹, Christian Teichert¹, Nazanin Fateh², Harald Köstenbauer², Gerardo Fontalvo², and Christian Mitterer² — ¹Institute of Physics, University of Leoben, Austria — ²Dept. of Physical Metallurgy and Materials Testing, University of Leoben, Austria

Scanning probe microscopy, in particular atomic-force microscopy (AFM) with its derivatives, is suited for quantitative morphological characterization of thin solid films and the evaluation of their physical properties on the nanometer scale. Here, we applied atomic force microscopy in tapping mode to study the surface morphology of reactive magnetron sputtered V₂O₅ films on MgO(001) and TiN/Ag nanocomposite films as a function of substrate temperature or Ag content, respectively. Correlation function analysis was used to determine the rms roughness, the vertical correlation length, and the Hurst parameter. In addition, the AFM images revealed the three-dimensional shape of the plate-like crystallites formed in the polycrystalline phase above 80 ^∘C. The results allow in conjunction with electron microscopy, x-ray diffraction and Raman spectroscopy to establish synthesis-structure relations of the film Finally, preliminary friction force microscopy measurements performed in contact mode will be presented to demonstrate the possibility to determine the friction coefficients of the coatings as a function of deposition conditions.

This work was supported by the Austrian NANO Initiative (Austrian Science Fund FWF) within the project "LowFrictionCoatings".