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Berlin 2008 – scientific programme

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O: Fachverband Oberflächenphysik

O 10: Semiconductor Substrates: Epitaxy and Growth

O 10.7: Talk

Monday, February 25, 2008, 14:45–15:00, MA 042

Investigation of a long-ranged ordered silicate adlayer on the 6H-SiC(0001) surface by LEED, AES and IPE — •Nabi Aghdassi, Ralf Ostendorf, and Helmut Zacharias — Westfälische Wilhelms-Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster

We have prepared well-ordered silicate adlayers on 6H-SiC(0001) surfaces by an ex situ hydrogen treatment at elevated temperatures. The generated surfaces appear to be fully passivated and therefore stable in ambient air. LEED patterns clearly feature a (√3×√3)R30 periodicity which can be attributed to a long range order of the created oxide layers. Furthermore AES spectra exhibit a distinct OKLL peak as well as a SiLVV peak showing a typical oxidic-like shape that is indicating the presence of Si-O bonds on the surface. The unoccupied electronic states of the SiO2/SiC interface are studied by inverse photoemission spectroscopy (IPE).

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