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Berlin 2008 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 53: Surface Nanopatterns

O 53.11: Vortrag

Mittwoch, 27. Februar 2008, 17:45–18:00, MA 043

Surface nano-patterns with high structural regularity, tunable properties, and diverse applications — •Yong Lei and Gerhard Wilde — Institut für Materialphysik, Universität Münster

Ordered arrays of surface nanostructures (nanodots and nanoholes) and free-standing one-dimensional nanostructures (nanotubes and nanowires) were fabricated on flat substrates using an UTAM (ultra-thin alumina mask) surface nano-patterning technique. The nanodot and nanohole arrays were prepared using vacuum evaporation processes and focused-ion-beam etching, respectively, while the nanowire and nanotube arrays were prepared using electrochemical processes and CVD processes. The structural parameters (size, spacing, and shape) of the UTAM-fabricated surface nanostructures can be adjusted by controlling the pore size of the UTAMs. The advantages of the UTAM surface nano-patterning, such as the achievement of tunable structural parameters and properties, large pattern area, high throughput and low equipment costs, make the technique suitable for fabricating ordered surface nanostructures with a broad range of applications ranging from optical, sensing, and electronics devices.

References: 1. Y. Lei, W.P. Cai, G. Wilde, Prog. Mater. Sci., 52 (2007) 465-539. 2. Y. Lei, Z. Jiao, M.H. Wu, G. Wilde, Adv. Eng. Mater., 9 (2007) 343-348. 3. Y. Lei, et al., Chem. Mater., 17 (2005) 580-585. 4. Y. Lei, W.K. Chim, H.P. Sun, G. Wilde, Appl. Phy. Lett., 86 (2005) 103106. 5. Y. Lei, W.K. Chim, J. Weissmuller, G. Wilde, et al., Nanotechnology, 16 (2005) 1892-1898. 6. Z. Chen, Y. Lei, et al., J. Cryst. Growth, 268 (2004) 560-563.

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