Berlin 2008 – scientific programme
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O: Fachverband Oberflächenphysik
O 55: Poster Session III - MA 141/144 (Methods: Atomic and Electronic Structure; Particles and Clusters; Heterogeneous Catalysis; Semiconductor Substrates: Epitaxy and Growth+Adsorption+Clean Surfaces+Solid-Liquid Interfaces; Oxides and Insulators: Solid-Liquid Interfaces+Epitaxy and Growth; Phase Transitions; Metal Substrates: Adsorption of Inorganic Molecules+Epitaxy and Growth; Surface Chemical Reactions; Bimetallic Nanosystems: Tuning Physical and Chemical Properties; Oxides and insulators: Adsorption; Organic, polymeric, biomolecular films; etc.)
O 55.47: Poster
Wednesday, February 27, 2008, 18:30–19:30, Poster F
Metal coatings prepared by organometallic chemical vapour deposition (OMCVD) — •Jörn Wochnowski1, Thimo Göllnitz1,2, Germar Hoffmann2, Roland Wiesendanger2, and Jürgen Heck1 — 1Institute of Inorganic and Applied Chemistry — 2Institute of Applied Physics; University of Hamburg
In microtechnology, the coating of temperature-sensitive substrates with high melting-point materials is challenging. The use of volatile organometallic compounds can be an answer to solve this ambitious task. We developed an experimental set-up for the deposition of elements, oxides, and functional composites in glass hollowware by means of OMCVD. With the first experimental set-up [1], the thermally induced decomposition of numerous elementorganic and metallorganic precursors has been tested for the deposition of catalytic or optic materials.
Here, we will present experimental data of the thermal deposition of different metals as tungsten [2] on a glass surface. We used Atomic Force Microscopy as one standard analytical surface method to obtain structural and morphological information of the deposited metal layers. We will discuss the preparation and the analytics of the prepared surfaces. With the objective to bring the deposition temperature of W(CO)6 further down to room temperature, we developed a new photolytic OMCVD set-up. We will demonstrate and discuss the realization of our experimental setup.
[1] J. Heck et al., DE 198,52,722, 2000, EP 1,001,050 A2, 2000.
[2] J.Wochnowski, doctoral thesis Hamburg 2007.